Power switch for backside power distribution

A method comprising:

• forming a first layer including a backside metal rail extending in a first direction;
• forming a second layer above the first layer along a second direction perpendicular to the first direction, wherein the second layer includes active regions for a set of power switches, wherein the active regions of the set of power switches are connected to form a contiguous region extending in the first direction, wherein the backside metal rail is electrically coupled to one or more of the active regions through one or more via contacts;
• and
• forming a third layer above the second layer along the second direction, wherein the third layer includes a front side metal rail electrically coupled to one or more of the set of power switches through one or more additional via contacts.

A method comprising:

• forming a first layer including a first backside metal rail and a second backside metal rail separated by a distance along a first direction;
• forming a second layer above the first layer along a second direction perpendicular to the first direction, wherein the second layer includes a first active region of one or more first transistors and a second active region of one or more second transistors, wherein the first backside metal rail is electrically coupled to the first active region through a first via contact, wherein the second backside metal rail is electrically coupled to the second active region through a second via contact, wherein the first active region has a length along the first direction larger than four times the distance;
• and
• forming a third layer above the second layer along the second direction, wherein the third layer includes a front side metal rail electrically coupled to the first active region through a third via contact.