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US 11,887,917 B2Granted
Encapsulated vertical interconnects for high-speed applications and methods of assembling same
AssigneeIntel Corporation
InventorsBok Eng Cheah, Jackson Chung Peng Kong, Kooi Chi Ooi, Yang Liang Poh
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Abstract
A semiconductor package substrate includes an encapsulated interconnect on a land side of the substrate. The encapsulated interconnect includes an integral metallic structure that has a smaller contact end against the semiconductor package substrate, and a larger contact end for board mounting.
Claims14
A method of forming an encapsulated interconnect, the method comprising:
- forming an encapsulation material on a land side of a semiconductor package substrate to contact a trace on the land side, the encapsulation material having an encapsulation height;
- forming a via in the encapsulation material;
- depositing a vertical interconnect in the via at a terminal end of the trace, the vertical interconnect having a portion that extends beyond the encapsulation height, the vertical interconnect having a stepped right-cylindrical cross-sectional area;
- drilling a first right-cylindrical via in the encapsulation material to expose the trace at a terminal end, the first right-cylindrical via having a first characteristic dimension;
- drilling a second right-cylindrical via in the encapsulation material after drilling the first right-cylindrical via, the second right-cylindrical having a second characteristic dimension that is larger than the first characteristic dimension wherein the first characteristic dimension is a height of the first right-cylindrical via and the second characteristic dimension is a height of the second right-cylindrical via;
- and
- filling the via by a process selected from electroplating and solder printing.
4 more elements
A method of forming an encapsulated interconnect, the method comprising:
- forming an encapsulation material on a land side of a semiconductor package substrate to contact a trace on the land side, the encapsulation material having an encapsulation height;
- forming a via in the encapsulation material;
- depositing a vertical interconnect in the via at a terminal end of the trace, the vertical interconnect having a portion that extends beyond the encapsulation height, the vertical interconnect having a frusto-conical cross-sectional area or a stepped right-cylindrical cross-sectional area, and wherein the vertical interconnect has a first height that extends from the trace to a plane at which the vertical interconnect emerges from the encapsulation material, a second height that extends beyond the encapsulation height, and a diameter on the plane at which the vertical interconnect emerges from the encapsulation material;
- and
- assembling the vertical interconnect to a land side substrate at the portion that extends beyond the encapsulation height, and under conditions to form an electrical-bump mass between the encapsulation height and the land side substrate, the electrical-bump mass being an integral portion of the vertical interconnect, the second height being a height of a meniscus formed by the electrical-bump mass.
2 more elements
Dependencies are inferred from the claim text.