US 11,887,901 B2 · Semiconductor device and test apparatus and method thereof

Abstract

The present disclosure relates to a semiconductor device, and a test apparatus and method thereof, capable of accurately detecting a defect by using a plurality of resistor circuits in a test process. The test apparatus of a semiconductor device according to an aspect of the present disclosure may include semiconductor chips each including an external resistor circuit disposed to be dispersed along an outer region of a chip and an internal resistor circuit disposed in an inner region of the chip in order to test cracks, and test equipment that drives the external resistor circuit and the internal resistor circuit and compares an output of the external resistor circuit with an output of the internal resistor circuit to detect whether a defect occurs in each of the semiconductor chips.

Claims17

Dependent claims

A semiconductor device comprising:

an external resistor circuit disposed to be dispersed along an outer region of a chip, wherein
the external resistor circuit includes:
an external resistor structure including at least one of a diffusion layer, a polysilicon layer, and a wiring layer;
an external transistor connected to the external resistor structure;
and
a first test pad disposed in a chip pad region and connected to the external transistor via the external resistor structure, and
the external resistor circuit is configured to output a current of the external transistor to the first test pad based on a change in a resistance value of the external resistor structure.

4 more elements

A test apparatus of a semiconductor device, comprising:

semiconductor chips each including an external resistor circuit disposed to be dispersed along an outer region of a chip and an internal resistor circuit disposed in an inner region of the chip;
and
a test equipment configured to drive the external resistor circuit and the internal resistor circuit, and compare an output of the external resistor circuit with an output of the internal resistor circuit to detect whether a defect has occurred in each of the semiconductor chips.

Dependencies are inferred from the claim text.

Semiconductor device and test apparatus and method thereof

Life of this patent

Semiconductor device and test apparatus and method thereof

Life of this patent

Abstract

Claims17