Semiconductor device and method for manufacturing the same
AssigneeSilergy Semiconductor Technology (Hangzhou) LTD
InventorsZheng Lv, Xunyi Song, Meng Wang
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AssigneeSilergy Semiconductor Technology (Hangzhou) LTD
InventorsZheng Lv, Xunyi Song, Meng Wang
Estimating the term…
A method of manufacturing a semiconductor device can include: forming an interlayer dielectric layer on an upper surface of a lower metal layer, the lower metal layer including first and second regions; forming a through hole extending from an upper surface of interlayer dielectric layer to the lower metal layer to expose the upper surface of the lower metal layer; forming a conductive layer covering a bottom part and sidewall parts of the through hole, and the upper surface of the interlayer dielectric layer; forming a first dielectric layer covering the first conductive layer on the first region of the lower metal layer; filling the through hole with a first metal; and forming an upper metal layer above the upper surface of the interlayer dielectric layer.
A semiconductor device, comprising:
Dependencies are inferred from the claim text.