Lithographic apparatus, substrate table, and non-uniform coating method
AssigneeASML Holding N.V.
InventorsBruce Tirri, Ping Zhou, Elizabeth Mary Stone, David Hart Peterson, Mehmet Ali Akbas, Ryan Mayer, Richard Bryan Lewis
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Abstract
A method of fabricating a substrate table includes supporting a table base and disposing a coating on a surface of the table base. The surface of the table base is substantially flat. The coating has a non-uniform thickness. The coating exerts a stress on the table so as to bend the table base. The non-uniform thickness causes a surface of the coating to become substantially flat after the bending.
Claims20
A method comprising:
- supporting a table base, wherein the table base comprises a surface that is substantially flat;
- and
- disposing a coating on the surface with a non-uniform thickness,
- wherein the coating exerts a stress on the table base so as to bend the table base, and
- wherein the non-uniform thickness causes a surface of the coating to become substantially flat after the bending.
A substrate table for supporting a substrate, the substrate table comprising:
- a table base comprising a surface;
- and
- a coating having a non-uniform thickness disposed on the surface of the table base,
- wherein a deflection of the table base from a nominal flatness is a function of a stress caused by the coating,
- wherein a cross-section profile of the coating is based on at least the stress and the non-uniform thickness,
- wherein a surface of the coating is substantially flat, and
- wherein the surface of the coating is configured to contact the substrate when the substrate table supports the substrate.
A substrate table for supporting a substrate, the substrate table comprising:
- a table base comprising a surface that is substantially flat;
- and
- a coating having a non-uniform thickness disposed on the surface of the table base,
- wherein the coating exerts a stress on the table base so as to bend the table base, and
- wherein the non-uniform thickness causes a surface of the coating to become substantially flat after the bending.
Dependencies are inferred from the claim text.