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US 11,887,875 B2Granted
Substrate storing container
AssigneeMiraial Co., Ltd.
InventorsYuya Narita, Tadatoshi Inoue
Life of this patent
Estimating the term…
Abstract
A substrate storing container includes: a container main body; a lid body that is attachable to and detachable from a container main body opening portion and can close the container main body opening portion; and a sealing member that closes the container main body opening portion together with the lid body, in which airtightness of the substrate storing space is enhanced so that 50% or more of a gas supplied to a substrate storing space can be discharged from an exhaust filter portion in a case in which a supply amount of a gas supplied from an outer space of the container main body to the substrate storing space through a gas supply filter portion is 22 liters per minute or less.
Claims12
A container main body including a substrate storing space formed therein which can store a plurality of substrates, and including an opening circumferential portion at one end thereof at which a container main body opening portion in communication with the substrate storing space is formed;
- a lid body that is attachable to and detachable from the opening circumferential portion and can close the container main body opening portion in a positional relationship being surrounded by the opening circumferential portion;
- a sealing member that is attached to the lid body, can abut the lid body and the opening circumferential portion, and intervenes between the opening circumferential portion and the lid body to adhere to and abut the opening circumferential portion, thereby closing the container main body opening portion together with the lid body;
- and
- a filter portion including a ventilation passage that allows the substrate storing space and an outer space of the container main body to be in communication with each other, a filter disposed in the ventilation passage, and a filter portion housing forming the ventilation passage, wherein the filter portion is disposed at the container main body, and allows a gas to pass between the outer space of the container main body and the substrate storing space through the filter;
- wherein the filter portion includes an exhaust filter portion that allows a gas to flow from the substrate storing space to the outer space of the container main body, and a gas supply filter portion that allows a gas to flow from the outer space of the container main body to the substrate storing space,
- wherein the filter is provided in the ventilation passage for exhaust that allows the gas to flow from the substrate storing space to the outer space of the container main body, and partitions the ventilation passage into an upstream side and a downstream side,
- wherein an exhaust filter film total effective area that allows a gas to flow through the filter is 200 mm2 or more, and
- wherein airtightness of the substrate storing space is enhanced so that 50% or more of a gas supplied to the substrate storing space can be discharged from the exhaust filter portion in a case in which a supply amount of a gas supplied from the outer space of the container main body to the substrate storing space through the gas supply filter portion is 22 liters per minute or less.
5 more elements
A substrate storing container comprising:
- a container main body including a substrate storing space formed therein which can store a plurality of substrates, and including an opening circumferential portion at one end thereof at which a container main body opening portion in communication with the substrate storing space is formed;
- a lid body that is attachable to and detachable from the opening circumferential portion and can close the container main body opening portion in a positional relationship being surrounded by the opening circumferential portion;
- a sealing member that is attached to the lid body, can abut the lid body and the opening circumferential portion, and intervenes between the opening circumferential portion and the lid body to adhere to and abut the opening circumferential portion and the lid body, thereby closing the container main body opening portion together with the lid body;
- and
- a filter portion including a ventilation passage that allows the substrate storing space and an outer space of the container main body to be in communication with each other, a filter disposed in the ventilation passage, and a filter portion housing forming the ventilation passage, wherein the filter portion is disposed at the container main body, and allows a gas to pass between the outer space of the container main body and the substrate storing space through the filter;
- wherein the filter portion includes an exhaust filter portion that allows a gas to flow from the substrate storing space to the outer space of the container main body, and a gas supply filter portion that allows a gas to flow from the outer space of the container main body to the substrate storing space, and
- wherein the filter has a flow rate performance of 15 seconds or less according to an IPA flow method that measures a time required for 500 mL of IPA to pass through a sample having an exhaust filter film total effective area of 13.8 cm2 under a pressure of 98 kPa using a pressurized filtering device, so that 50% or more of a gas supplied to the substrate storing space can be discharged from the exhaust filter portion in a case in which a supply amount of a gas supplied from the outer space of the container main body to the substrate storing space through the gas supply filter portion is 22 liters per minute or less.
4 more elements
A substrate storing container comprising:
- a container main body including a substrate storing space formed therein which can store a plurality of substrates, and including an opening circumferential portion at one end thereof at which a container main body opening portion in communication with the substrate storing space is formed;
- a lid body that is attachable to and detachable from the opening circumferential portion and can close the container main body opening portion in a positional relationship being surrounded by the opening circumferential portion;
- a sealing member that is attached to the lid body, can abut the lid body and the opening circumferential portion, and intervenes between the opening circumferential portion and the lid body to adhere to and abut the opening circumferential portion and the lid body, thereby closing the container main body opening portion together with the lid body;
- and
- a filter portion including a ventilation passage that allows the substrate storing space and an outer space of the container main body to be in communication with each other, and a filter portion housing forming the ventilation passage, wherein the filter portion is disposed at the container main body, and allows a gas to pass between the outer space of the container main body and the substrate storing space;
- wherein the filter portion includes an exhaust filter portion that allows a gas to flow from the substrate storing space to the outer space of the container main body, and a gas supply filter portion that allows a gas to flow from the outer space of the container main body to the substrate storing space, and
- wherein the exhaust filter portion is higher than the gas supply filter portion in terms of a flow rate performance measured according to an IPA flow method that measures a time required for 500 mL of IPA to pass through a sample having an exhaust filter film total effective area of 13.8 cm2 under a pressure of 98 kPa using a pressurized filtering device, so that 50% or more of a gas supplied to the substrate storing space can be discharged from the exhaust filter portion in a case in which a supply amount of a gas supplied from the outer space of the container main body to the substrate storing space through the gas supply filter portion is 22 liters per minute or less.
4 more elements
Dependencies are inferred from the claim text.