Laser-sustained plasma lamps with graded concentration of hydroxyl radical
AssigneeKLA Corporation
InventorsOleg Khodykin, Ilya Bezel
Life of this patent
Estimating the term…
Abstract
A plasma lamp is disclosed. The plasma lamp includes a gas containment structure configured to contain a gas and generate a plasma within the gas containment structure. The gas containment structure is formed from a glass material transparent to illumination from a pump laser and the broadband radiation emitted by the plasma. The gas containment structure includes a glass wall and the glass within the glass wall includes an OH concentration distribution that varies across a thickness of the glass wall.
Claims18
A plasma lamp comprising:
- a gas containment structure configured to contain a gas and generate a plasma within the gas containment structure, the gas containment structure formed from a glass material at least partially transparent to illumination from a pump laser and at least a portion of broadband radiation emitted by the plasma,
- wherein the gas containment structure includes a glass wall, wherein the glass wall includes an OH concentration distribution that varies gradually through the bulk region of the glass wall.
A laser-sustained plasma light source comprising:
- a gas containment structure configured to contain a volume of gas, wherein the gas containment structure includes a glass wall, wherein the glass wall includes an OH concentration distribution that varies gradually through the bulk region of the glass wall;
- a laser pump source configured to generate an optical pump to sustain a plasma within the plasma bulb;
- and
- a light collector element configured to collect at least a portion of broadband light emitted from the plasma, the gas containment structure formed from a glass material at least partially transparent to illumination from the laser pump source and at least a portion of broadband radiation emitted by the plasma.
A characterization system comprising:
- a laser-sustained light source comprising:
- a gas containment structure configured to contain a volume of gas, wherein the gas containment structure includes a glass wall, wherein the glass wall includes an OH concentration distribution that varies gradually through the bulk region of the glass wall;
- a laser pump source configured to generate an optical pump to sustain a plasma within the gas containment structure;
- a light collector element configured to collect at least a portion of broadband light emitted from the plasma, the gas containment structure formed from a glass material at least partially transparent to illumination from the laser pump source and at least a portion of broadband radiation emitted by the plasma;
- a set of illumination optics configured to direct broadband light from the laser-sustained light source to one or more samples;
- a set of collection optics configured to collect light emanating from the one or more samples;
- and
- a detector assembly.
A method of forming a plasma lamp comprising:
- providing a gas containment structure, the gas containment structure including a glass wall;
- and
- coating an internal surface of the glass wall with one or more chemical precursors to alter an OH concentration at the internal surface such that a first OH concentration at the internal surface is greater than a second OH concentration within the bulk region of the glass wall.
A method of forming a plasma lamp comprising:
- providing a gas containment structure, the gas containment structure including a glass wall;
- and
- treating an internal surface of the glass wall of the gas containment structure to alter an OH concentration at the internal surface such that a first OH concentration at the internal surface is greater than a second OH concentration within a bulk region of the glass wall, wherein the OH concentration distribution varies gradually through the bulk region of the glass wall.
Dependencies are inferred from the claim text.