Inductor built-in substrate and method for manufacturing the same
AssigneeIbiden Co., Ltd.
InventorsHiroaki Kodama, Atsushi Ishida, Kazuro Nishiwaki
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Abstract
An inductor built-in substrate includes a core substrate having an opening and a first through hole, a first plating film formed in the first through hole of the core substrate, a magnetic resin body having a second through hole and including a magnetic resin filled in the opening of the core substrate, and a second plating film formed in the second through hole of the magnetic resin body such that the second plating film is formed in contact with the magnetic resin body.
Claims20
An inductor built-in substrate, comprising:
- a core substrate having an opening and a first through hole;
- a first copper foil formed on a first side of the core substrate;
- a first plating film formed in the first through hole of the core substrate;
- a second copper foil formed on a second side of the core substrate on an opposite side with respect to the first side;
- a magnetic resin body having a second through hole and comprising a magnetic resin filled in the opening of the core substrate;
- and
- a second plating film formed in the second through hole of the magnetic resin body such that the second plating film is formed in contact with the magnetic resin body,
- wherein the magnetic resin body is formed in the opening of the core substrate such that the magnetic resin is in direct contact with an inner wall of the core substrate in the opening, and the second plating film is formed such that the second plating film extends on first and second end portions of the magnetic resin body on the first and second sides of the core substrate respectively and extends on the first and second copper foils respectively, and that a thickness of the second plating film formed on the first and second copper foil is larger than a thickness of the second plating film formed on the first and second end portions of the magnetic resin body.
A method for manufacturing an inductor built-in substrate, comprising:
- forming an opening in a core substrate comprising a copper-clad laminated plate;
- forming a first through hole in the core substrate;
- filling a magnetic resin in the opening such that a magnetic resin body is formed in the opening of the core substrate;
- forming a second through hole in the magnetic resin body;
- forming a first plating film in the first through hole of the core substrate;
- forming a first copper foil on a first side of the core substrate;
- forming a second copper foil on a second side of the core substrate on an opposite side with respect to the first side;
- and
- forming a second plating film in the second through hole of the magnetic resin body such that the second plating film is formed in contact with the magnetic resin body,
- wherein the magnetic resin body is formed in the opening of the core substrate such that the magnetic resin is in direct contact with an inner wall of the core substrate in the opening, and the second plating film is formed such that the second plating film extends on first and second end portions of the magnetic resin body on the first and second sides of the core substrate respectively and extends on the first and second copper foils respectively, and that a thickness of the second plating film formed on the first and second copper foil is larger than a thickness of the second plating film formed on the first and second end portions of the magnetic resin body.
Dependencies are inferred from the claim text.