Simulation system for semiconductor process and simulation method thereof

A process simulation system comprising:

• a random access memory (RAM) to which a process simulator is loaded, the process simulator comprising a plurality of process emulation cells operating as a time series-based recurrent neural network (RNN) and outputting profiles respectively corresponding to steps of process of manufacturing semiconductors;
• and
• a central processing unit (CPU) configured to control the plurality of process emulation cells to train and predict the profiles based on a final target profile corresponding to a final step among the steps of process,
• wherein a first process emulation cell among the plurality of process emulation cells is configured to, based on a previous output profile that is output at a previous process step in time series, a target profile of a current process step, process condition information and prior knowledge information, generate a current output profile corresponding to the current process step,
• wherein the process condition information indicates one or more conditions to be applied in the current process step, and
• wherein the prior knowledge information is used to filter the current output profile or limit a shape indicated by the current output profile.