Apparatus and method for removing a single particulate from a substrate

A method of removing at least a single particulate from a substrate, said method comprising the steps of:

• a. providing a plurality of reservoir vessels that store a plurality of gases, in which each reservoir vessel stores a respective gas, and different gases are matched with different corresponding materials that are selected from a group of two or more materials that include different elements;
• b. determining at least one constituent of a material composition of the at least one single particulate, in which the at least one constituent of the material composition is selected from the group of two or more materials that include different elements;
• c. determining, from among the plurality of gases, a gas that matches the determined at least one constituent of the material composition of the at least one single particulate;
• and
• d. providing the gas matched to the determined constituent of the material composition in an environment of the at least one single particulate,
• e. wherein the matched gas contributes to removing the at least one single particulate from the substrate.

A non-transitory computer readable medium storing a computer program including instructions which, when executed by a computer, prompt an apparatus for removing at least a single particulate from a substrate to execute a method of removing at least a single particulate from a substrate;

• wherein the apparatus for removing at least a single particulate from a substrate comprises:
• a plurality of reservoir vessels that are configured to store a plurality of gases, in which each reservoir vessel is configured to store a respective gas, and different gases are matched with different corresponding materials that are selected from a group of two or more materials that include different elements;
• an analysis unit designed to determine at least one constituent of a material composition of the at least one single particulate, in which the at least one constituent of the material composition is selected from the group of two or more materials that include different elements and determine, from among the plurality of gases, a gas that matches the determined at least one constituent of the material composition of the at least one single particulate;
• and
• at least one gas injection system designed to provide a gas matched to the determined constituent in an environment of the at least one single particulate;
• wherein the matched gas contributes to removing the at least one single particulate from the substrate;
• and
• wherein the method of removing at least a single particulate from a substrate comprises:
• determining the at least one constituent of the material composition of the at least one single particulate;
• determining, from among the plurality of gases, a gas that matches the determined at least one constituent of the material composition of the at least one single particulate;
• and
• providing the gas matched to the determined constituent of the material composition in the environment of the at least one single particulate.

An apparatus for removing at least a single particulate from a substrate, said apparatus comprising:

• an analysis unit designed to determine at least one constituent of a material composition of the at least one single particulate;
• at least one gas injection system designed to provide a gas matched to the determined constituent in an environment of the at least one single particulate;
• and
• at least one micromanipulator unit designed to interact with the at least one single particulate, in which the at least one micromanipulator unit comprises bismuth (Bi) or a bismuth alloy, and the at least one constituent of the material composition of the at least one single particulate comprises tin (Sn);
• wherein the matched gas contributes to removing the at least one single particulate from the substrate.

An apparatus for removing one or more single particulates from a substrate, said apparatus comprising:

• a plurality of reservoir vessels that are configured to store a plurality of gases, wherein each reservoir vessel is configured to store a respective gas, and different gases are matched with different corresponding materials that are selected from a group of two or more materials that include different elements;
• an analysis unit configured to determine at least one constituent of a material composition of a first one of the one or more single particulates, in which the at least one constituent of the material composition is selected from the group of two or more materials that include different elements, and determine, from among the plurality of gases, one or more gases that match the determined at least one constituent of the material composition of the first one of the one or more single particulates;
• and
• at least one gas injection system configured to provide the one or more gases matched to the determined constituent in an environment of the first one or a second one of the one or more single particulates;
• wherein the one or more matched gases contribute to removing the one or more single particulates from the substrate.