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US 11,886,096 B2Granted
Assembly including a non-linear element and a method of use thereof
AssigneeASML Netherlands B.V.
InventorsVitaliy Prosyentsov, Yongfeng Ni
Life of this patent
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Abstract
An assembly including a non-linear element configured for generating broadband radiation from input radiation coupled into the non-linear element. The assembly further includes an optical element positioned downstream of the non-linear element configured to reflect a fraction of the broadband radiation back into the non-linear element. The non-linear element can be a nonlinear fiber, such as a hollow-core photonic crystal fiber (HC-PCF).
Claims21
An assembly comprising:
- a non-linear element configured to generate broadband radiation from input radiation coupled into the non-linear element, the broadband radiation comprising a continuous range of wavelengths;
- and
- an optical element positioned downstream of the non-linear element, the optical element configured to reflect a fraction of the broadband radiation back into an output end of the non-linear element,
- wherein the optical element is configured to reflect at least some radiation at or near the wavelength or wavelengths of the input radiation back into the non-linear element.
1 more element
A method of generating broadband radiation, the method comprising:
- coupling input radiation into a non-linear element configured to generate broadband radiation therein and to output the broadband radiation, the broadband radiation comprising a continuous range of wavelengths;
- and
- reflecting a majority of the broadband radiation back into an output end of the non-linear element from an optical element positioned downstream of the non-linear element.
An assembly comprising:
- a non-linear element configured to generate broadband radiation from input radiation coupled into the non-linear element;
- and
- an optical element positioned downstream of the non-linear element, the optical element configured to reflect a majority of the broadband radiation output from the non-linear element back into the non-linear element.
Dependencies are inferred from the claim text.