Slotted waveguides including a metamaterial structure
AssigneeGlobalFoundries U.S. Inc.
InventorYusheng Bian
Life of this patent
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Abstract
Photonics structures including a slotted waveguide and methods of fabricating such photonics structures. The photonics structure includes a slotted waveguide having a first waveguide core and a second waveguide core laterally positioned adjacent to the first waveguide core. The first waveguide core is separated from the second waveguide core by a slot. The photonics structure further includes a metamaterial structure having a plurality of elements separated by a plurality of gaps and a dielectric material in the plurality of gaps. The metamaterial structure and the slot of the slotted waveguide are positioned with an overlapping arrangement.
Claims13
A photonics structure comprising:
- a substrate;
- a slotted waveguide including a first waveguide core and a second waveguide core laterally positioned adjacent to the first waveguide core, the first waveguide core separated from the second waveguide core by a slot, the first waveguide core including a first sidewall and a first side edge portion adjacent to the first sidewall, the second waveguide core including a second sidewall and a second side edge portion adjacent to the second sidewall, and the slot extending from the first sidewall to the second sidewall;
- and
- a metamaterial structure including a plurality of elements separated by a plurality of gaps and a dielectric material in the plurality of gaps,
- wherein the slotted waveguide is positioned in a vertical direction between the substrate and the metamaterial structure, and the plurality of elements of the metamaterial structure overlap with the slot of the slotted waveguide, the first side edge portion of the first waveguide core, and the second side edge portion of the second waveguide core.
A method of forming a photonics structure, the method comprising:
- forming a slotted waveguide including a first waveguide core and a second waveguide core positioned adjacent to the first waveguide core, wherein the first waveguide core is separated from the second waveguide core by a slot, the first waveguide core includes a first sidewall and a first side edge portion adjacent to the first sidewall, the second waveguide core includes a second sidewall and a second side edge portion adjacent to the second sidewall, and the slot extends from the first sidewall to the second sidewall;
- and
- forming a metamaterial structure including a plurality of elements separated by a plurality of gaps and a dielectric material in the plurality of gaps, wherein the slotted waveguide is positioned in a vertical direction between a substrate and the metamaterial structure, and the plurality of elements of the metamaterial structure overlap with the slot of the slotted waveguide, the first side edge portion of the first waveguide core, and the second side edge portion of the second waveguide core.
Dependencies are inferred from the claim text.