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US 11,886,001 B2Granted
Optical waveguide fabrication process
AssigneeSnap Inc.
InventorsAmit Singh, David G. Fliszar
Life of this patent
Estimating the term…
Abstract
Methods of fabricating a waveguide module are presented that include the steps of providing a glass substrate having first and second substantially planar parallel surfaces and comprising one or more cells in a first arrangement and singulating the glass substrate to produce one or more singulated cells. Singulated cells are treated with a chemical agent, laminated to a carrier substrate, processed, and delaminated from the carrier wafer and optionally subjected to further processing.
Claims19
A waveguide module fabrication method, comprising:
- providing an optically transparent substrate having first and second substantially planar parallel surfaces and comprising one or more cells in a predetermined first arrangement;
- singulating the substrate to produce one or more singulated cells, wherein the one or more singulated cells are separated from the substrate to form one or more singulated cells free from other cells or the substrate;
- immersing the one or more singulated cells in a strengthening agent to produce one or more treated cells, wherein the surfaces of each singulated cell of the one or more treated cells is treated with the strengthening agent;
- releasably laminating the one or more treated cells to predetermined sites on a surface of a carrier substrate to provide one or more laminated cells, wherein the predetermined sites correspond to the first arrangement;
- processing the one or more laminated cells;
- and
- delaminating the one or more laminated cells from the carrier substrate to provide one or more delaminated processed cells.
4 more elements
A method of manufacturing an optical waveguide, the method comprising the steps of:
- providing an optically transparent substrate having first and second substantially planar parallel surfaces and comprising one or more cells in a predetermined first arrangement;
- singulating the optically transparent substrate to produce one or more singulated cells, wherein the one or more singulated cells are separated from the substrate to form one or more singulated cells free from other cells or the substrate;
- immersing the one or more singulated cells in a strengthening agent to produce one or more treated cells, wherein the surfaces of each singulated cell of the one or more treated cells is treated with the strengthening agent;
- releasably laminating the one or more treated cells to predetermined sites on a surface of a carrier substrate to provide one or more laminated cells, wherein the predetermined sites correspond to the first arrangement;
- processing the one or more laminated cells;
- delaminating cells from the carrier substrate to provide one or more delaminated processed cells;
- and
- performing secondary processing of the one or more delaminated processed cells.
5 more elements
A waveguide module produced by a method comprising the steps of:
- providing an optically transparent substrate having first and second substantially planar parallel surfaces and comprising one or more cells in a predetermined first arrangement;
- singulating the optically transparent substrate to produce one or more singulated cells, wherein the one or more singulated cells are separated from the substrate to form one or more singulated cells free from other cells or the substrate;
- immersing the one or more singulated cells in a strengthening agent to produce one or more treated cells, wherein the surfaces of each singulated cell of the one or more treated cells is treated with the strengthening agent;
- releasably laminating the one or more treated cells to predetermined sites on a surface of a carrier substrate to provide one or more laminated cells, wherein the predetermined sites correspond to the first arrangement;
- processing the one or more laminated cells;
- delaminating the one or more laminated cells from the carrier substrate to provide one or more delaminated processed cells;
- and
- performing secondary processing of the one or more delaminated processed cells to provide a waveguide module.
5 more elements
Dependencies are inferred from the claim text.