UV reflective mirrors for display fabrication
AssigneeMaterion Corporation
InventorsKi-Sung Song, Hunho Lee, Edgar E. Vidal, Kyung H. Chung, Jason R. Clune
Life of this patent
Estimating the term…
Abstract
An apparatus which includes an ultraviolet laser and at least one reflective mirror having a substrate which is made from beryllium, an aluminum metal matrix, or silicon carbide. The at least one mirror is adapted to reflect a laser beam generated from the ultraviolet laser, which can then be used on a silicon film used in the production of an electronic display. The laser beam can be used to anneal the silicon film, or in a laser lift-off process for separating the silicon film from a temporary substrate upon which the silicon film was mounted.
Claims13
An apparatus comprising:
- an ultraviolet laser;
- and
- at least one reflective mirror adapted to reflect a laser beam generated from the ultraviolet laser;
- wherein the at least one reflective mirror comprises a mirror substrate,
- wherein the mirror substrate is made from silicon carbide or an aluminum metal matrix composite, and has:
- (i) an optical Figure of Merit (FoM) resonant frequency value of at least 6 relative to a fused-quartz substrate;
- (ii) an optical FoM self-weight deflection value of less than 0.030 relative to a fused-quartz substrate;
- (iii) an optical FoM steady-state thermal distortion coefficient value of less than 0.350 relative to a fused-quartz substrate;
- and
- (iv) an optical FoM transient thermal distortion coefficient value of less than 0.600 relative to a fused-quartz substrate.
A method of making an electronic part, comprising:
- receiving an ultraviolet laser apparatus comprising an ultraviolet laser and at least one reflective mirror comprising a mirror substrate;
- generating a laser beam with the ultraviolet laser;
- and
- reflecting the laser beam with the at least one reflective mirror toward a precursor film to produce the electronic part;
- wherein the mirror substrate is made from silicon carbide or an aluminum metal matrix composite, and has:
- (i) an optical Figure of Merit (FoM) resonant frequency value of at least 6 relative to a fused-quartz substrate;
- (ii) an optical FoM self-weight deflection value of less than 0.030 relative to a fused-quartz substrate;
- (iii) an optical FoM steady-state thermal distortion coefficient value of less than 0.350 relative to a fused-quartz substrate;
- and
- (iv) an optical FoM transient thermal distortion coefficient value of less than 0.600 relative to a fused-quartz substrate.
An ultraviolet reflective mirror, comprising:
- a mirror substrate;
- and
- an ultraviolet reflective coating deposited upon a front surface of the mirror substrate;
- wherein the mirror substrate is made from silicon carbide or an aluminum metal matrix composite, and has:
- (i) an optical Figure of Merit (FoM) resonant frequency value of at least 6 relative to a fused-quartz substrate;
- (ii) an optical FoM self-weight deflection value of less than 0.030 relative to a fused-quartz substrate;
- (iii) an optical FoM steady-state thermal distortion coefficient value of less than 0.350 relative to a fused-quartz substrate;
- and
- (iv) an optical FoM transient thermal distortion coefficient value of less than 0.600 relative to a fused-quartz substrate.
Dependencies are inferred from the claim text.