Graphene plasmon resonators
AssigneeRegents of the University of Minnesota
InventorsSang-Hyun Oh, In-Ho Lee, Tony Low
Life of this patent
Estimating the term…
Abstract
The subject matter of this specification can be embodied in, among other things, a graphene plasmon resonator that includes a planar patterned layer having a collection of electrically conductive segments, and a collection of dielectric segments, each dielectric segment defined between a corresponding pair of the electrically conductive segments, a graphene layer substantially parallel to the planar patterned layer and overlapping the collection of electrically conductive segments, and a planar dielectric layer between the planar patterned layer and the graphene layer.
Claims12
A graphene plasmon resonator, comprising:
- a planar patterned layer comprising:
- a plurality of electrically conductive segments comprising at least one of metal and graphene;
- and
- a plurality of dielectric segments, each dielectric segment defined between a corresponding pair of the electrically conductive segments and configured as an electrical gate;
- a graphene layer substantially parallel to the planar patterned layer, having a first face and a second face opposite the first face, overlapping the plurality of electrically conductive segments, and configured to support excited plasmons, wherein the planar patterned layer is arranged on the first face;
- a source electrode arranged on the second face;
- a drain electrode arranged on the second face and spaced apart from the source electrode;
- a planar dielectric layer between the planar patterned layer and the graphene layer;
- and
- a waveguide comprising a dielectric segment arranged substantially parallel to the graphene plasmon resonator, wherein the dielectric segment defines a major axis and is sized to support a waveguide mode that propagates along the major axis.
A method of forming a graphene plasmon resonator, the method comprising:
- providing a planar dielectric layer;
- forming a planar patterned layer upon a first side of the planar dielectric layer wherein the planar patterned layer comprises a plurality of electrically conductive segments and a plurality of dielectric segments, each dielectric segment defined between a corresponding pair of the electrically conductive segments, wherein each electrically conductive segment is configured as an electrical gate;
- applying a graphene layer, having a first face and a second face opposite the first face and configured to support excited plasmons, upon the planar dielectric layer opposite the planar patterned layer;
- forming a source electrode on the second face;
- forming a drain electrode on the second face and spaced apart from the source electrode;
- and
- further providing a waveguide comprising a dielectric segment arranged substantially parallel to the graphene plasmon resonator, wherein the dielectric segment defines a major axis and is sized to support a waveguide mode that propagates along the major axis.
Dependencies are inferred from the claim text.