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AssigneesUniversity of Maryland, College Park, Government of the United States of America, AS Represented By the Secretary of Commerce
InventorsCheng Zhang, Shawn Divitt, Wenqi Zhu, Amit Kumar Agrawal, Henri Lezec
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High-performance optical-metasurface-based components configured to at frequencies of UV light and, in particular, in deep UV range and performing multiple optical-wavefront-shaping functions (among which there are high-numerical-aperture lensing, accelerating beam generation, and hologram projection). As a representative material for such components, hafnium oxide demands creation and establishment of a novel process of manufacture that is nevertheless based on general principles of Damascene lithography, to be compatible with existing technology and yet sufficient for producing high-aspect-ratio features that currently-used materials and processes simply do not deliver. The described invention opens a way towards low-form-factor, multifunctional ultraviolet nanophotonic platforms based on flat optical components and enabling diverse applications including lithography, imaging, spectroscopy, and quantum information processing.
A method for fabricating a structured electromagnetic metasurface containing a sub-wavelength-scaled surface pattern, the method comprising:
A method for fabricating an all-dielectric metasurface optical device including at least one of a polarization-independent metalens, a polarization-independent metahologram, a polarization-independent Airy beam generator, said device having optical transmittance of at least 50% at a wavelength of 364 nm or shorter, the method comprising:
Dependencies are inferred from the claim text.