Tolerance error estimating apparatus, method, program, reconstruction apparatus and control apparatus
AssigneeRigaku Corporation
InventorTakumi Ota
Life of this patent
Estimating the term…
Loading patent…
AssigneeRigaku Corporation
InventorTakumi Ota
Estimating the term…
A tolerance error estimating apparatus, method, program, reconstruction apparatus and control apparatus capable of estimating a deviation of a drive axis from a reference position with respect to driving time are provided. A tolerance error estimating apparatus (processing apparatus 300) X-ray analysis apparatus comprises a specific position calculating section 320 for obtaining a specific position of a reference sample at each rotation driving time from X-ray detection images and a deviation amount calculating section 330 for calculating the deviation amount Δx in the x direction and Δy in the y direction of the center position of a rotation drive shaft as the rotation drive axis at each rotation driving time from the reference position based on the specific position, when the z direction of the orthogonal coordinate system fixed to the sample is set the direction parallel to the rotation drive axis.
A tolerance error estimating apparatus for estimating a tolerance error of a rotation drive axis of an X-ray analysis apparatus, comprising:
A tolerance error estimating method for estimating a tolerance error of a rotation drive axis of an X-ray analysis apparatus, comprising steps of:
A non-transitory computer readable recording medium having recorded thereon a tolerance error estimating program for estimating a tolerance error of a rotation drive axis of an X-ray analysis apparatus, the program making a computer execute processes of:
Dependencies are inferred from the claim text.