Imaging type X-ray microscope
AssigneeRigaku Corporation
InventorsKazuhiko Omote, Raita Hirose, Shuichi Kato, Yuriy Platonov
Life of this patent
Estimating the term…
Loading patent…
AssigneeRigaku Corporation
InventorsKazuhiko Omote, Raita Hirose, Shuichi Kato, Yuriy Platonov
Estimating the term…
An imaging type X-ray microscope capable of enlarging a numerical aperture even with high energy X-rays and acquiring a magnified image with sufficient intensity even in a laboratory. The imaging type X-ray microscope comprises an X-ray irradiation unit having a microfocal and high-power X-ray source and a condenser mirror for focusing and irradiating the emitted X-rays toward a sample, a sample holding unit for holding the sample, a reflecting mirror type X-ray lens unit for imaging X-rays transmitted through the sample, and an imaging unit for acquiring the imaged X-ray image, wherein each mirror constituting the condenser mirror and the reflecting mirror type X-ray lens unit has a reflecting surface formed with a multilayer film having a high reflectivity in X-rays of a specific wavelength.
An imaging type X-ray microscope comprising:
Dependencies are inferred from the claim text.