Three-axis micromachined gyroscope

A measuring method of angular velocity applied to a three-axis micromachined gyroscope, comprising a base, a vibration part connected to the base and suspended on the base, a drive electrode connected with the driving vibration part, and a detection part connected with the vibration part, the vibration part comprising a vibration assembly for receiving Coriolis force and generating a position change, the vibration assembly comprising four weights, wherein the method comprises steps of:

• using the drive electrode to drive the four weights to swing in a plane parallel to the base;
• a first weight and a second weight swing concentrically in anti-phase;
• a third weight and a fourth weight swing in concentrically anti-phase;
• the swing of the first weight and the swing of the third weight are in anti-phase;
• or, the first weight and the second weight swing concentrically in same phase;
• the third weight and the fourth weight swing concentrically and in same phase;
• the swing of the first weight and the swing of the third weight are in anti-phase;
• receiving an angular velocity for providing the four weights with Coriolis force such that position changes under the action of Coriolis force;
• detecting position changes of the four weights in the Coriolis direction by the detection part, and converting the position changes into electrical signal output;
• calculating the angular velocity according to the electrical signal.