Detection device, processing device, equipment, detection method, and detection program
AssigneeNikon Corporation
InventorsYoshihiro Nakagawa, Taro Matsuo
Life of this patent
Estimating the term…
Abstract
A detection device includes: a first detector which irradiates light onto the target object and detects light emitted from the target object; a first shape information generator which generates first shape information representing a first shape of the target object on the basis of a detection result of the first detector; and a second shape information generator which adds a second shape, which is based on information different from the detection result of the first detector, to the first shape, and which generates second shape information representing a shape including the first shape and the second shape.
Claims16
A processing device comprising:
- an obtainer that obtains first distance information that is detected information of a distance to a target object;
- a first generator that generates first shape information that indicates a shape of the target object based on the first distance information;
- a memory storage that stores additional shape information that indicates an additional shape to be added at a relative position preliminarily set with respect to a portion of the shape of the target object;
- and
- a second generator that generates combined shape information in which the additional shape is added to the shape of the target object at the relative position;
- wherein
- the additional shape information is generated based on information that is different from the first distance information.
A method comprising:
- obtaining distance information that is detected information of a distance to a target object;
- generating shape information that indicates a shape of the target object based on the distance information;
- storing additional shape information that indicates an additional shape to be added at a relative position preliminarily set with respect to a portion of the shape of the target object;
- and
- generating combined shape information in which the additional shape is added to the shape of the target object at the relative position.
Dependencies are inferred from the claim text.