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US 11,885,019 B2Granted
Susceptor with ring to limit backside deposition
AssigneeASM IP Holding B.V.
InventorsMark Hawkins, Matthew G. Goodman, Shawn Thomas
Life of this patent
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Abstract
A susceptor including a generally circular body having a face with a radially inward section and a radially outward section proximate a circumference of the body, the radially outward section having at least one ring extending upward for contacting a bottom surface of a substrate, and wherein the radially inward section lacks a ring extending upward from the face.
Claims20
A method of supporting a substrate comprising the steps of:
- providing a susceptor in a reaction chamber, the susceptor comprising:
- a generally circular body with a radially inward section having a face for receiving the substrate, the face having a gridded surface extending upward and a radially outward section having a plurality of rings extending upward,
- wherein the radially inward section comprises a perimeter defined by an angled sidewall concentric with a most inward of the plurality of rings, wherein the angled sidewall comprises a plurality of holes extending through the body and wherein the angled sidewall comprises a plurality of inwardly protruding elongated protrusions;
- positioning the substrate above the susceptor;
- locating the substrate in contact with the face;
- limiting a backside deposition with the contact between the plurality of rings and the substrate;
- and,
- limiting lateral movement of the substrate to less than 2 mm with the contact between the gridded surface and the substrate.
5 more elements
A method of supporting a substrate comprising the steps of:
- providing a susceptor in a reaction chamber, the susceptor comprising:
- a generally circular body having a face with a radially inward section and a radially outward section proximate a circumference of the body, the radially outward section having a plurality of plateaus, wherein the plateaus define continuous rings as seen in a top down view,
- wherein each continuous ring extends upward for contacting a bottom surface of a substrate, wherein each continuous ring comprises a continuous loop of solid material extending up uniformly to an associated height, wherein the associated height of each successive continuous ring is successively lower with decreasing distance to the radially inward section,
- wherein the radially inward section comprises a perimeter defined by an angled sidewall concentric with a most inward of the continuous rings, wherein the angled sidewall comprises a plurality of holes extending through the body and wherein the angled sidewall comprises a plurality of inwardly protruding elongated protrusions, and
- wherein, upon retention of the substrate on an associated one of the continuous rings, the associated one of the continuous rings contacts the bottom surface of the substrate to prevent gases from reaching the bottom surface;
- positioning the substrate above the susceptor;
- and
- locating the substrate in contact with the face of the generally circular body.
5 more elements
Dependencies are inferred from the claim text.