Infiltrating carbon nanotubes with carbon to prevent delamination from a substrate
OwnerRobert Davis, Richard Vanfleet +2inventors
InventorsRobert Davis, Richard Vanfleet, Kyle Zufelt, David Jensen
Life of this patent
Estimating the term…
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OwnerRobert Davis, Richard Vanfleet +2inventors
InventorsRobert Davis, Richard Vanfleet, Kyle Zufelt, David Jensen
Estimating the term…
A method includes depositing a layer of alumina over a silicon substrate, providing a patterned photoresist over the layer of alumina, providing an iron catalyst layer over the patterned photoresist, providing the iron catalyst layer over an exposed portion of the alumina, providing a first iron catalyst site over a first portion of the alumina, providing a second iron catalyst site over a second portion of the alumina, growing a first carbon nanotube on the first iron catalyst site, growing a second carbon nanotube on the second iron catalyst site, infiltrating the first carbon nanotube and the second carbon nanotube with carbon, and cooling both the first carbon nanotube and the second carbon nanotube. The infiltrating strengthens the first carbon nanotube and the second carbon nanotube to not delaminate from the substrate when the first carbon nanotube and the second carbon nanotube are cooled.
A carbon nanotube (CNT) grid, comprising:
Dependencies are inferred from the claim text.