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AssigneeQorvo US, Inc.
InventorsDerya Deniz, Matthew Wasilik, Robert Kraft, John Belsick
Estimating the term…
A structure includes a substrate including a wafer or a portion thereof; and a piezoelectric bulk material layer comprising a first portion deposited onto the substrate and a second portion deposited onto the first portion, the second portion comprising an outer surface having a surface roughness (Ra) of 4.5 nm or less. Methods for depositing a piezoelectric bulk material layer include depositing a first portion of bulk layer material at a first incidence angle to achieve a predetermined c-axis tilt, and depositing a second portion of the bulk material layer onto the first portion at a second incidence angle that is smaller than the first incidence angle. The second portion has a second c-axis tilt that substantially aligns with the first c-axis tilt.
A plurality of acoustic resonator structures prepared from a single wafer, the wafer comprising a surface and a piezoelectric bulk material layer deposited onto the surface, the piezoelectric bulk material layer comprising a first portion of a bulk material layer deposited at an off-normal angle of incidence to achieve a desired c-axis tilt and a second portion of the bulk material layer deposited onto the first portion at normal incidence,
A plurality of acoustic resonator structures prepared from a single wafer, the wafer comprising a surface and a piezoelectric bulk material layer deposited onto the surface, the piezoelectric bulk material layer comprising a first portion of a bulk material layer deposited at an off-normal angle of incidence to achieve a desired c-axis tilt and a second portion of the bulk material layer deposited onto the first portion at normal incidence,
A plurality of acoustic resonator structures prepared from a single wafer, the wafer comprising a surface and a piezoelectric bulk material layer deposited onto the surface, the piezoelectric bulk material layer comprising a first portion of a bulk material layer deposited at an off-normal angle of incidence to achieve a desired c-axis tilt and a second portion of the bulk material layer deposited onto the first portion at normal incidence,
Dependencies are inferred from the claim text.