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US 11,884,786 B2Granted
Elastic parylene
AssigneeSpecialty Coating Systems, Inc.
InventorsAndreas Greiner, Tobias Moss, Rakesh Kumar
Life of this patent
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Abstract
Elastic Parylene films produced via chemical vapor deposition polymerization (CVDP) on a substrate are disclosed.
Claims16
A method of preparing a chemically cross-linked elastic Parylene or poly(para-xylylene) (PPX) polymer film, comprising:
- mixing a substituted paracyclophane and a vinyl-functionalized paracyclophane to form a mixture;
- and
- co-polymerizing the mixture via a chemical vapor deposition polymerization (CVDP) process on a substrate to form the chemically cross-linked elastic polymer film,
- wherein the chemically cross-linked elastic polymer film has a vinyl content of about 5% or less.
1 more element
Dependencies are inferred from the claim text.