Multilayer body and electronic device
AssigneeSumitomo Electric Industries, Ltd.
InventorsFuminori Mitsuhashi, Yasunori Tateno, Masahiro Adachi, Yoshiyuki Yamamoto
Life of this patent
Estimating the term…
Loading patent…
AssigneeSumitomo Electric Industries, Ltd.
InventorsFuminori Mitsuhashi, Yasunori Tateno, Masahiro Adachi, Yoshiyuki Yamamoto
Estimating the term…
A multilayer body includes a base portion and a graphene film. In an ion mass distribution versus depth of the multilayer body determined by time-of-flight secondary ion mass spectrometry, detection intensities of C6 ions have a maximum value at a depth of greater than 0 nm and 2.5 nm or less from an exposed surface. Detection intensities of C3 ions have a maximum value at a depth of greater than 0 nm and 3.0 nm or less from the exposed surface. Detection intensities of SiC4 ions have a maximum value at a depth of 0.5 nm or greater and 5.0 nm or less from the exposed surface. Detection intensities of SiC ions have a maximum value at a depth of 0.5 nm or greater and 10.0 nm or less from the exposed surface. Detection intensities of Si2 ions have a maximum value at a depth of 0.5 nm or greater and 10.0 nm or less from the exposed surface. A value obtained by dividing the maximum value of the detection intensities of SiC4 ions by an average of detection intensities of SiC4 ions associated with a region of the multilayer body is 1 or greater and 3.5 or less, the region having distances from the exposed surface in a thickness direction of the multilayer body of equal to or greater than 8 nm and 12 nm or less.
A multilayer body comprising:
Dependencies are inferred from the claim text.