Enclosed cavity structures
AssigneeX-Celeprint Limited
InventorsRonald S. Cok, Raja Fazan Gul, António José Marques Trindade
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Abstract
An example of a cavity structure comprises a cavity substrate comprising a substrate surface, a cavity extending into the cavity substrate, the cavity having a cavity bottom and cavity walls, and a cap disposed on a side of the cavity opposite the cavity bottom. The cavity substrate, the cap, and the one or more cavity walls form a cavity enclosing a volume. A component can be disposed in the cavity and can extend above the substrate surface. The component can be a piezoelectric or a MEMS device. The cap can have a tophat configuration. The cavity structure can be micro-transfer printed from a source wafer to a destination substrate.
Claims15
A cavity structure, comprising:
- a component support;
- a component extending from and suspended by the component support;
- and
- a structure tether extending from the component support;
- a cavity substrate comprising a substrate surface and wherein the component support is disposed on the substrate surface;
- a destination substrate;
- and
- a broken or separated structure tether physically connected to the cavity substrate,
- wherein the cavity substrate is disposed on the destination substrate.
A cavity structure, comprising:
- a component support;
- and
- a component extending from and suspended by the component support;
- and
- a structure tether extending from the component support;
- a cavity substrate comprising a substrate surface and wherein the component support is disposed on the substrate surface;
- and
- a cavity structure source wafer having a sacrificial portion adjacent to a structure anchor and the cavity substrate is disposed over the sacrificial portion and physically connected to the structure anchor with a structure tether.
Dependencies are inferred from the claim text.