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AssigneeFujibo Holdings, Inc.
InventorsRyuma Matsuoka, Hiroshi Kurihara, Satsuki Narushima, Yamato Takamizawa
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A polishing pad is equipped with a polishing layer having a polyurethane sheet, wherein a tan δ peak value change rate determined by formula: tan δ peak value change rate=|tan δ peakwet−tan δ peakdry|/tan δ peakdry×100, is not more than 15%, where tan δ peakwet represents the peak value of the loss tangent tan δ, of the polyurethane sheet in a wet state after being immersed in water for three days, within a temperature range of 20-100° C. in a tensile mode under an initial load of 148 g with a strain range of 0.1% at a measurement frequency of 1.6 Hz, and tan δ peakdry represents the peak value of the loss tangent tan δ, of the polyurethane sheet in a dry state without being immersed in water, within a temperature range of 20-100° C. in a tensile mode under an initial load of 148 g with a strain range of 0.1% at a measurement frequency of 1.6 Hz.
A polishing pad comprising a polishing layer including a polyurethane sheet, wherein a rate of change in a tan δ peak value calculated in accordance with the following equation between a loss tangent tan δ peak value (a tan δ peakwet) within a temperature range of 20° C. to 100° C. of the polyurethane sheet in a wet state after immersion in a water bath for 3 days in a tensile mode with an initial load of 148 g, a strain range of 0.1%, and a measurement frequency of 1.6 Hz, and a loss tangent tan δ peak value (a tan δ peakdry) within a temperature range of 20° C. to 100° C. of the polyurethane sheet in a dry state without immersion in the water bath in a tensile mode with an initial load of 148 g, a strain range of 0.1%, and a measurement frequency of 1.6 Hz is 15% or less:
A polishing pad comprising a polishing layer including a polyurethane sheet, wherein
Dependencies are inferred from the claim text.