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US 11,883,857 B2Granted
Cleaning solution detection device
AssigneeKctech Co., Ltd.
InventorsHyung Chul Kim, You Sun Jung
Life of this patent
Estimating the term…
Abstract
A cleaning solution detection device includes a transfer part configured to unload and transfer a substrate having a surface to which a cleaning solution is applied when a cleaning process is completed, a detector configured to detect the cleaning solution that falls from the surface of the substrate in a process in which the substrate is unloaded and transferred by the transfer part, and a controller configured to determine whether a dangerous situation occurs due to a fall of the cleaning solution based on information detected by the detector.
Claims16
A cleaning solution detection device comprising:
- a transfer part configured to unload and transfer a substrate having a surface to which a cleaning solution is applied when a cleaning process is completed;
- a detector configured to detect the cleaning solution that falls from the surface of the substrate in a process of transferring the substrate by the transfer part;
- and
- a controller configured to determine whether a dangerous situation occurs due to a fall of the cleaning solution based on information detected by the detector.
1 more element
Dependencies are inferred from the claim text.