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US 11,883,837 B2Granted
System and method for liquid dispense and coverage control
AssigneeTokyo Electron Limited
InventorsMirko Vukovic, Daniel Fulford, Anton J. Devilliers
Life of this patent
Estimating the term…
Abstract
Light can be used to monitor coating a liquid on a substrate. By directing the light to a spot on the substrate, when the liquid passes through the spot, some light will be reflected, while some light will be scattered. Monitoring this behavior can indicate whether a substrate has been successfully coated with the liquid, as well as identifying defects. Further, coating times can be monitored to make process adjustments.
Claims9
A system for dispensing liquid on a substrate, the system comprising:
- a substrate holder configured to hold a substrate and rotate the substrate about an axis;
- a dispense unit configured to dispense a liquid on a working surface of the substrate while the substrate is being rotated on the substrate holder;
- a first laser configured to direct a first laser beam at an edge of the working surface of the substrate;
- a first detector positioned to capture scattered light from the first laser beam directed at the edge of the working surface of the substrate;
- a second laser configured to direct a second laser beam at an interior portion of the working surface of the substrate;
- a second detector positioned to capture scattered or reflected light from the second laser beam directed at the interior portion of the working surface of the substrate;
- a processor configured to monitor scattered or reflected light from the second laser beam directed at the interior portion of the working surface of the substrate to monitor intermediate progress of the liquid, and to monitor scattered light from the first laser beam directed at the edge of the working surface of the substrate to identify a pattern of scattered light indicating that the liquid has reached the edge of the substrate;
- and
- the processor further configured to identify an actual coating time of the liquid beginning from initiation of a given dispense of the liquid onto the working surface until the liquid reaches the edge of the working surface, and compare the actual coating time of the liquid to an expected coating time of the liquid.
6 more elements
A system for dispensing a liquid on a substrate, the system comprising:
- a substrate holder configured to hold a substrate and rotate the substrate about an axis;
- a dispense unit configured to dispense the liquid on a working surface of the substrate while the substrate is being rotated on the substrate holder;
- a first laser configured to direct a first laser beam an edge of the working surface of the substrate;
- a first detector positioned to capture reflected light from the first laser beam directed at the edge of the working surface of the substrate;
- a second laser configured to direct a second laser beam at an interior portion of the working surface of the substrate;
- a second detector positioned to capture scattered or reflected light from the second laser beam directed at the interior portion of the working surface of the substrate;
- a processor configured to monitor scattered or reflected light from the second laser beam directed at the interior portion of the working surface of the substrate to monitor intermediate progress of the liquid, and to monitor reflected light from the first laser beam directed at the edge of the working surface of the substrate to identify a pattern of reflected light indicating that the liquid has reached the edge of the substrate;
- and
- the processor further configured to identify an actual coating time of the liquid beginning from initiation of a given dispense of the liquid onto the working surface until the liquid reaches the edge of the working surface, and compare the actual coating time of the liquid to an expected coating time of the liquid.
6 more elements
A system for dispensing liquid on a substrate, the system comprising:
- a substrate holder configured to hold a substrate and rotate the substrate about an axis;
- a dispense unit configured to dispense a liquid on a working surface of the substrate while the substrate is being rotated on the substrate holder;
- a laser configured to direct a laser beam at an edge location on the working surface of the substrate;
- a first detector positioned to capture scattered light from the laser beam directed at the edge location of the substrate;
- a second detector positioned to capture reflected light from the laser beam directed at the edge location of the substrate;
- a processor configured to monitor scattered light and reflected light from the laser beam directed at the edge location on the substrate to identify a pattern of scattered light and a pattern of reflected light, respectively, indicating that the liquid has reached the edge location on the substrate;
- and
- the processor further configured to identify an actual coating time of the liquid beginning from initiation of a given dispense of the liquid onto the working surface until the liquid reaches the edge location of the working surface, and compare the actual coating time of the liquid to an expected coating time of the liquid.
5 more elements
Dependencies are inferred from the claim text.