Microfluidic-based apparatus and method for vaporization of liquids

A vaporization apparatus that is placed within a surrounding environment and configured to vaporize liquid from a liquid source into the surrounding environment, comprising:

• at least one liquid source;
• a first planar structure;
• a second planar structure in fluid contact with the liquid source, configured with at least one ridge structure and at least one through hole to deliver liquid from the liquid source to the first planar structure by surface tension;
• the second planar structure is made from metal;
• a plurality of vaporization ports that are formed in the first planar structure comprising a through hole;
• wherein the through hole in the first planar structure is configured with lateral dimensions ranging from 10 um to 300 um;
• wherein the first planar structure is in fluid contact with liquid from the second planar structure on a first side, and a surrounding environment on a second side;
• wherein fluid is transported from the first side of the first planar structure to the second side of the first planar structure through the through hole in the first planar structure;
• the dimension of the vaporization ports and the planar structure materials are selected to wick liquid from the liquid source by surface tension;
• at least one of a plurality of planar heating elements or a continuous planar heating element, comprising thin film resistive elements formed on the second side of the first planar structure and disposed around at least part of at least one vaporization port;
• wherein;
• the first planar structure and the planar heating elements are microfabricated;
• and,
• heat applied from the planar heating element, through the first planar structure to liquid that is in direct contact with the first planar structure, vaporizes the liquid thereby releasing vapor through the plurality of vaporization ports into the surrounding environment.