Intraluminal ultrasound imaging device comprising a substrate separated into a plurality of spaced-apart segments, intraluminal ultrasound imaging device comprising a trench, and method of manufacturing

A method of manufacturing an intraluminal ultrasound imaging device, comprising:

• providing a substrate comprising a hard mask on a first side of the substrate;
• forming a first plurality of holes through the hard mask in a first area of the hard mask such that the first area comprises a screen formed by remaining portions of the hard mask;
• etching the substrate through the screen such that a trench is formed under the screen that at least partially defines a spaced-apart segment of the substrate, wherein the spaced-apart segment comprises a first sidewall adjacent to the trench and below the screen;
• and
• forming at least one transducer element over a second area of the hard mask adjacent to the first area, wherein the second area of the hard mask is disposed over the spaced-apart segment.

An intraluminal ultrasound imaging device, comprising:

• a flexible elongate member configured to be positioned within a body lumen of a patient, the flexible elongate member comprising a proximal portion and a distal portion;
• and
• an ultrasound imaging assembly disposed at the distal portion of the flexible elongate member, the ultrasound imaging assembly configured to obtain imaging data of the body lumen, the ultrasound imaging assembly comprising a transducer array comprising:
• a spaced-apart substrate segment defined at least partially by a trench adjacent to the spaced-apart substrate segment,
• a silicon oxide layer disposed over the spaced-apart substrate segment, and
• at least one transducer element disposed on the silicon oxide layer,
• wherein the trench is formed by etching the spaced-apart substrate segment through a screen formed by portions of the silicon oxide layer remaining when a plurality of holes are formed through the silicon oxide layer,
• wherein the spaced-apart substrate segment comprises a first sidewall adjacent to the trench and below the screen.