Device and method for characterizing the surface shape of a test object
AssigneeCarl Zeiss SMT GmbH
InventorsJochen Hetzler, Holger Jennewein
Life of this patent
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Abstract
A device and a method for characterizing the surface shape of a test object. The device for characterizing the surface shape of a test object has a test arrangement (130, 230) for determining the surface shape of a test object (111, 112, 113, 211, 212, 213) using a test wave. The test wave has a wavefront generated by diffraction at a diffractive optical element. The device additionally has a first vacuum chamber (110, 210) and a second vacuum chamber (120, 220), wherein the second vacuum chamber (120, 220) has a magazine for mounting at least two diffractive optical elements (121, 122, 123, 221, 222, 223).
Claims15
An apparatus for characterizing a surface shape of test objects, comprising:
- a test arrangement configured to determine the surface shape of the test objects using a test wave, the test wave having a wavefront produced by diffraction at one of at least two diffractive optical elements;
- a first vacuum chamber;
- and
- a second vacuum chamber;
- wherein the test arrangement is arranged within the first vacuum chamber;
- wherein the first vacuum chamber is configured to receive a test object for characterization of a surface shape of the test object by the apparatus;
- and
- wherein the second vacuum chamber comprises a supply chamber configured to store the at least two diffractive optical elements at vacuum when the first vacuum chamber receives the test object.
Dependencies are inferred from the claim text.