Resist composition, method of forming resist pattern, compound, and acid diffusion-controlling agent
AssigneeTokyo Ohka Kogyo Co., Ltd.
InventorKhanhTin Nguyen
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AssigneeTokyo Ohka Kogyo Co., Ltd.
InventorKhanhTin Nguyen
Estimating the term…
A resist composition that contains a base material component exhibiting changed solubility in a developing solution under action of acid and a compound (D0) represented by General Formula (d0), in which R01, R02, R03, and R04 each independently represents a hydrogen atom, a hydroxy group, a halogen atom, or an alkyl group; alternatively, R01 and R02, R02 and R03, or R03 and R04 are bonded to each other to form an aromatic ring; R05 represents a hydrogen atom or an alkyl group; Y represents a group that forms an alicyclic group together with a carbon atom *C; provided that at least one of the carbon atoms that form the alicyclic group is substituted with an ether bond, a thioether bond, a carbonyl group, a sulfinyl group, or a sulfonyl group; m represents an integer of 1 or more, and Mm+ represents an m-valent organic cation.
A resist composition which generates an acid upon exposure and exhibits changed solubility in a developing solution under action of acid, the resist composition comprising:
A compound represented by General Formula (d0):
An acid diffusion-controlling agent comprising a compound represented by General Formula (d0):
Dependencies are inferred from the claim text.