Fluid control device, fluid supply system, and fluid supply method
AssigneeFujikin Incorporated
InventorsMasahiko Takimoto, Toshihide Yoshida, Tsutomu Shinohara, Kouji Nishino
Life of this patent
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Abstract
A fluid control device 10 comprises a valve device V2 including actuators 22 and 24 for opening and closing a flow path and adjusting a flow rate of a fluid flowing through the flow path, a pressure sensor PT provided upstream of the valve device V2, and a control circuit 12 connected to the valve device V2 and the pressure sensor PT, and the control circuit 12 controls an operation of the actuator based on a pressure measured by the pressure sensor PT and a reference pressure drop curve, while the upstream side of the fluid control device is closed and the valve device is opened using the actuators.
Claims10
A fluid control device comprising:
- a valve device configured to open/close a flow path and adjust a flow rate of a fluid flowing through the flow path,
- a pressure sensor provided upstream of the valve device;
- and
- a control circuit connected to the valve device and the pressure sensor;
- wherein the valve device includes a main actuator operated by a driving fluid, a sub actuator extendable by an electrical drive, a valve element operable by the main actuator and the sub actuator, an operating member moved by the main actuator and the sub actuator, and an elastic member for biasing the sub actuator toward the valve element,
- the main actuator is configured to move the operation member against a biasing force of the elastic member and the biasing force of the elastic member is increased by an extension of the sub actuator to move the operation member, and
- the control circuit controls an operation of the sub actuator based on a pressure measured by the pressure sensor and a reference pressure drop curve, in a state where an upstream side of the fluid control device is closed and the valve device is opened by using the main actuator.
Dependencies are inferred from the claim text.