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US 11,873,576 B2Granted
Silicon based melting composition and manufacturing method for silicon carbide single crystal using the same
AssigneeLG Chem, Ltd.
InventorsHorim Lee, Junghwan Kim, Chanyeup Chung, Jung Min Ko
Life of this patent
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Abstract
A silicon-based molten composition according to an exemplary embodiment is used in a solution growing method for forming a silicon carbide single crystal, includes silicon (Si), yttrium (Y), and iron (Fe), and is expressed in Formula 1. SiaYbFec [Formula 1] In Formula 1, the a is equal to or greater than 0.4 and equal to or less than 0.8, the b is equal to or greater than 0.2 and equal to or less than 0.3, and the c is equal to or greater than 0.1 and equal to or less than 0.2.
Claims7
A method for manufacturing a silicon carbide single crystal, comprising:
- preparing a silicon carbide seed crystal;
- preparing a silicon-based molten composition including silicon (Si), yttrium (Y), and iron (Fe), and as expressed in Formula 1;
- forming a molten solution including the silicon-based molten composition and carbon (C);
- and
- obtaining the silicon carbide single crystal on the silicon carbide seed crystal from the surface of the molten solution:
- SiaYbFec [Formula 1]
- wherein, in Formula 1, the a is equal to or greater than 0.5 and equal to or less than 0.7, the b is equal to or greater than 0.2 and equal to or less than 0.3, and the c is equal to or greater than 0.1 and equal to or less than 0.2,
- wherein in the obtaining of the silicon carbide single crystal, a yttrium silicide is not precipitated, and
- wherein a growing speed of the silicon carbide single crystal is equal to or greater than 0.1 mm/h.
6 more elements
Dependencies are inferred from the claim text.