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US 11,873,575 B2Granted
Ingot puller apparatus having heat shields with voids therein
AssigneeGlobalWafers Co., Ltd.
InventorsJiaying Ke, Sumeet S. Bhagavat, Jaewoo Ryu, Benjamin Meyer, William Luter, Carissima Marie Hudson
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Abstract
Ingot puller apparatus for preparing a single crystal silicon ingot by the Czochralski method are disclosed. The ingot puller apparatus includes a heat shield. The heat shield has a leg segment that includes a void (i.e., an open space without insulation) disposed in the leg segment. The heat shield may also include insulation partially within the heat shield.
Claims11
An ingot puller apparatus for growing a single crystal silicon ingot from a melt of silicon, the apparatus comprising:
- a puller housing defining a growth chamber;
- a crucible disposed within the growth chamber for containing the melt of silicon;
- a pulling mechanism for pulling the ingot from the melt along a pull axis;
- and
- a heat shield disposed within the growth chamber, the heat shield defining a central passage for receiving the ingot as the ingot is pulled by the pulling mechanism, the heat shield comprising:
- a leg segment that extends downward relative to the pull axis, the leg segment comprising a leg segment housing that defines a leg chamber;
- insulation disposed within the leg chamber;
- a ledge disposed in the leg chamber, the insulation being supported by the ledge, the insulation being separated from the leg segment housing by a gap, the gap being disposed above the ledge;
- and
- a foot that extends from the leg segment at a distal end of the leg segment, wherein a distance between at least a portion of the foot and the pull axis is less than a distance between the leg segment and the pull axis;
- and
- wherein the leg segment has a void formed therein, at least a portion of the void being disposed below the ledge.
9 more elements
Dependencies are inferred from the claim text.