Back to results
US 11,872,603 B2Granted
Method for cleaning a synthetic surface
AssigneeBrooks Automation (Germany) GmbH
InventorsLutz Rebstock, Matthias Fryda, Thorsten Matthée
Life of this patent
Estimating the term…
Abstract
The invention relates to a method for cleaning a synthetic surface, in particular to remove metal dirt and/or particles therefrom, said method being characterized by the following steps: a) the synthetic surface is rinsed with deionized water; b) the synthetic surface is rinsed with electrolyzed water; and c) the synthetic surface is rinsed with deionized water.
Claims10
A method for cleaning a plastic's surface so as to effect removing metallic particulate contaminants from the plastic's surface, comprising:
- a) rinsing the plastic's surface with deionized water, then
- b) rinsing the plastic's surface with electrolyzed water, wherein the plastic's surface is rinsed with anodic water followed by cathodic water so as to remove positive charges left on the plastic's surface by the anodic water, and then
- c) rinsing the plastic's surface with deionized water;
- wherein the rinsing of the plastic's surface with the deionized water, then the electrolyzed water, and then the deionized water effects cleansing of the plastic's surface to a predetermined cleanliness value.
1 more element
Dependencies are inferred from the claim text.