Solid-state power amplifiers with cooling capabilities
AssigneeApplied Materials, Inc.
InventorsRajesh Kumar Putti, Vinodh Ramachandran, Ananthkrishna Jupudi, Lean Wui Koh, Prashant Agarwal
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Abstract
Methods and apparatus for processing a substrate. For example, a processing chamber can include a power source, an amplifier connected to the power source, comprising at least one of a gallium nitride (GaN) transistor or a gallium arsenide (GaAs) transistor, and configured to amplify a power level of an input signal received from the power source to heat a substrate in a process volume, and a cooling plate configured to receive a coolant to cool the amplifier during operation.
Claims14
A processing chamber, comprising:
- a power source;
- an amplifier connected to the power source, comprising at least one of a gallium nitride (GaN) transistor or a gallium arsenide (GaAs) transistor, and
- configured to amplify a power level of an input signal received from the power source to heat a substrate in a process volume;
- a cooling plate configured to receive a coolant to cool the amplifier during operation, wherein the cooling plate includes a plurality of cooling channels configured to allow the coolant to flow within the cooling plate;
- and
- a controller in communication with the amplifier and configured to control a flow of the coolant through the plurality of cooling channels.
A method for processing a substrate in a processing chamber, comprising:
- amplifying, using an amplifier comprising at least one of a gallium nitride (GaN) transistor or a gallium arsenide (GaAs) transistor, a power level of an input signal received from a power source;
- outputting an amplified signal to a substrate support disposed in a processing volume of the processing volume to heat a substrate;
- supplying a coolant to a cooling plate disposed on the amplifier to cool the amplifier during operation, wherein supplying the coolant comprises circulating the coolant through a plurality of cooling channels configured to allow the coolant to flow within the cooling plate;
- and
- controlling flow of the coolant through the plurality of cooling channels using a controller in communication with the amplifier.
Dependencies are inferred from the claim text.