Accelerometer with two seesaws

An accelerometer for measuring acceleration in the direction of a z-axis which is perpendicular to an xy-plane, comprising a first proof mass and a second proof mass, wherein the first proof mass is adjacent to the second proof mass, and the accelerometer further comprises one or more central anchor points located substantially between the first proof mass and the second proof mass, the accelerometer further comprises a first side anchor point and a second side anchor point, and wherein

• the first proof mass is suspended from the first side anchor point and from the one or more central anchor points with a first suspension structure, and the first suspension structure allows the first proof mass to undergo rotation about a first rotation axis,
• the second proof mass is suspended from the one or more central anchor points and from the second side anchor point with a second suspension structure, and the second suspension structure allows the second proof mass to undergo rotation about a second rotation axis, and the first and the second rotation axes are parallel to each other and define an x-direction which is parallel to the first and the second rotation axes and a y-direction which is perpendicular to the x-direction,
• the x-coordinate of the second side anchor point is greater than the x-coordinate of the first side anchor point, and the y-coordinate of the center of mass of the first proof mass is greater than the y-coordinate of the first rotation axis, and the y-coordinate of the center of mass of the second proof mass is less than the y-coordinate of the second rotation axis,
• the first suspension structure comprises a first torsion element which is attached between the first side anchor point and the first proof mass, and the first suspension structure also comprises a second torsion element which is attached between one of the one or more central anchor points and the first proof mass,
• the second suspension structure comprises a third torsion element which is attached between one of the one or more central anchor points and the second proof mass, and the second suspension structure also comprises a fourth torsion element which is attached between the second side anchor point and the second proof mass, and wherein
• the x-coordinate of the center of the first torsion element is less than the x-coordinate of the first side anchor point, and the x-coordinate of the center of the fourth torsion element is greater than the x-coordinate of the second side anchor point, wherein the x-coordinate of the center of the third torsion element is greater than the x-coordinate of the center of the second torsion element.

An accelerometer for measuring acceleration in the direction of a z-axis which is perpendicular to an xy-plane, comprising a first proof mass and a second proof mass, wherein the first proof mass is adjacent to the second proof mass, and the accelerometer further comprises one or more central anchor points located substantially between the first proof mass and the second proof mass, the accelerometer further comprises a first side anchor point and a second side anchor point, and wherein

• the first proof mass is suspended from the first side anchor point and from the one or more central anchor points with a first suspension structure, and the first suspension structure allows the first proof mass to undergo rotation about a first rotation axis,
• the second proof mass is suspended from the one or more central anchor points and from the second side anchor point with a second suspension structure, and the second suspension structure allows the second proof mass to undergo rotation about a second rotation axis, and the first and the second rotation axes are parallel to each other and define an x-direction which is parallel to the first and the second rotation axes and a y-direction which is perpendicular to the x-direction,
• the x-coordinate of the second side anchor point is greater than the x-coordinate of the first side anchor point, and the y-coordinate of the center of mass of the first proof mass is greater than the y-coordinate of the first rotation axis, and the y-coordinate of the center of mass of the second proof mass is less than the y-coordinate of the second rotation axis,
• the first suspension structure comprises a first torsion element which is attached between the first side anchor point and the first proof mass, and the first suspension structure also comprises a second torsion element which is attached between one of the one or more central anchor points and the first proof mass,
• the second suspension structure comprises a third torsion element which is attached between one of the one or more central anchor points and the second proof mass, and the second suspension structure also comprises a fourth torsion element which is attached between the second side anchor point and the second proof mass, and wherein
• the x-coordinate of the center of the first torsion element is less than the x-coordinate of the first side anchor point, and the x-coordinate of the center of the fourth torsion element is greater than the x-coordinate of the second side anchor point,
• wherein the x-coordinate of the center of the third torsion element is less than the x-coordinate of the center of the second torsion element,
• wherein the one or more central anchor points comprise a first central anchor point and a second central anchor point, and the second torsion element is attached between the first central anchor point and the first proof mass, and the third torsion element is attached between the second central anchor point and the second proof mass,
• and wherein the y-coordinate of the first rotation axis is less than the y-coordinate of the second rotation axis.