Planar-type plasma diagnosis apparatus, wafer-type plasma diagnosis apparatus in which planar-type plasma diagnosis apparatus is buried, and electrostatic chuck in which planar-type plasma diagnosis apparatus is buried

A wafer-type plasma diagnosis apparatus with a planar-type plasma diagnosis apparatus embedded therein, comprising a circular member in which at least one planar-type plasma diagnosis apparatus is embedded,

• wherein,
• the planar-type plasma diagnosis apparatus includes a transmission antenna configured to apply a frequency-variable microwave to plasma, a reception antenna configured to receive the microwave from the plasma, and a body part configured to encompass the transmission antenna and the reception antenna so that the transmission antenna and the reception antenna are insulated from each other,
• each of an upper surface of the transmission antenna configured to apply the microwave and an upper surface of the reception antenna configured to receive the microwave has a planar shape,
• the upper surface of the transmission antenna and the upper surface of the reception antenna are horizontally adjacent to each other to face each other, and
• in each of the upper surface of the transmission antenna and the upper surface of the reception antenna, a length from one end to the other end in an opposite direction is smaller than a length from one end to the other end in a direction perpendicular to the opposite direction.

An electrostatic chuck in which a planar-type plasma diagnosis apparatus is embedded,

• wherein,
• the planar-type plasma diagnosis apparatus includes a transmission antenna configured to apply a frequency-variable microwave to plasma, a reception antenna configured to receive the microwave from the plasma, and a body part configured to encompass the transmission antenna and the reception antenna so that the transmission antenna and the reception antenna are insulated from each other,
• each of an upper surface of the transmission antenna configured to apply the microwave and an upper surface of the reception antenna configured to receive the microwave has a planar shape,
• the upper surface of the transmission antenna and the upper surface of the reception antenna are horizontally adjacent to each other to face each other,
• in each of the upper surface of the transmission antenna and the upper surface of the reception antenna, a length from one end to the other end in an opposite direction is smaller than a length from one end to the other end in a direction perpendicular to the opposite direction, and
• the planar-type plasma diagnosis apparatus is embedded in a surface of the electrostatic chuck.