Nanoplasmonic instrumentation, materials, methods and system integration
AssigneeOkinawa Institute of Science and Technology School Corporation
InventorsNikhil Bhalla, Amy Shen Fried, Kang-Yu Chu
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AssigneeOkinawa Institute of Science and Technology School Corporation
InventorsNikhil Bhalla, Amy Shen Fried, Kang-Yu Chu
Estimating the term…
A method for making a plasmonic mushroom array includes: forming a plurality of metal nano-islands each having nanometer-range dimensions on a surface of a glass substrate; and subjecting to the glass substrate having the plurality of metal nano-islands formed thereon to reactive ion etching such that the plurality of metal nano-islands are converted to a plurality of mushroom-shaped structures each having a metal cap supported by a pillar made of a material of the glass substrate and each having dimensions smaller than the dimensions of the nano-islands, the plurality of mushroom-shaped structures being arranged in a substantially regular pattern with intervals smaller than average intervals between the nano-islands, thereby forming the plurality of nano-scale mushroom-shaped structures on the glass substrate that can exhibit localized surface plasmon resonance.
A localized surface plasmon resonance device, comprising:
Dependencies are inferred from the claim text.