Superalloy target
AssigneesOerlikon Surface Solutions AG, PfäFfikon, Plansee Composite Materials GmbH
InventorsPeter Polcik, Jurgen Ramm
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Abstract
A superalloy target wherein the superalloy target has a polycrystalline structure of random grain orientation, the average grain size in the structure is smaller than 20 μm, and the porosity in the structure is smaller than 10%. Furthermore, the invention includes a method of producing a superalloy target by powder metallurgical production, wherein the powder-metallurgical production starts from alloyed powder(s) of a superalloy and includes the step of spark plasma sintering (SPS) of the alloyed powder(s).
Claims6
Superalloy target made by powder metallurgical production wherein
- the superalloy target has a polycrystalline structure of random grain orientation,
- an average grain size in the structure is smaller than 20 μm,
- a porosity in the structure is smaller than 10%, and
- a proportion of a fcc crystal structure is in the range of 80 to 99% by volume, wherein,
- the superalloy is a Co-based superalloy with cobalt as the main metallic component, comprising C and at least one element of Cr, W, Ni, Ti, Al, Ir, and Ta as an alloying element, wherein
- the target comprises gamma prime and carbide precipitates.
Dependencies are inferred from the claim text.