Multiplexing control of multiple positional sensors in device manufacturing machines

A method comprising:

• generating, by a light source driver, a driving signal;
• producing, by a demultiplexer and using the driving signal, a plurality of output driving signals;
• delivering each of the plurality of output driving signals to a respective one of a plurality of sensors;
• receiving, by an amplifier, from a first sensor of the plurality of sensors, a first signal associated with an event representative of a positioning of a substrate within a device manufacturing machine;
• generating, by the amplifier and based on the received first signal, a second signal;
• receiving, by an analog-to-digital converter, the second signal;
• generating, by the analog-to-digital converter and based on the second signal, a third signal;
• and
• obtaining, by a processing device and based on the third signal, information about the positioning of the substrate within the device manufacturing machine.

A non-transitory computer readable medium storing instructions thereon that when executed by a processing device cause a sensor controller to:

• generate, by a light source driver, a driving signal;
• produce, by a demultiplexer and using the driving signal, a plurality of output driving signals;
• deliver each of the plurality of output driving signals to a respective one of a plurality of sensors;
• receive, by an amplifier, from a first sensor of the plurality of sensors, a first signal associated with an event representative of a positioning of a substrate within a device manufacturing machine;
• generate, by the amplifier and based on the received first signal, a second signal;
• receive, by an analog-to-digital converter, the second signal;
• generate, by the analog-to-digital converter, based on the second signal, a third signal;
• and
• obtain, based on the third signal, information about the positioning of the substrate within the device manufacturing machine.