US 11,860,591 B2 · Process recipe creation and matching using feature models

Abstract

A method includes receiving a set of feature models, each feature model of the set of feature models corresponding to a respective feature associated with processing of a component, receiving a set of target properties for processing the component, where the set of target properties includes, for each feature, a respective target, determining, based on the set of feature models, one or more sets of predicted processing parameters in view of the set of target properties, generating one or more candidate process recipes each corresponding to a respective one of the one or more sets of predicted processing parameters, where the one or more candidate process recipes each correspond to a set of predicted properties including, for each feature, a respective predicted property value resulting from component processing, and selecting, from the one or more candidate process recipes, a process recipe for processing the component.

Claims14

Dependent claims

A method comprising:

obtaining, by a processing device, one or more candidate process recipes each corresponding to a respective set of predicted processing parameters of one or more sets of predicted processing parameters that are determined to fail to satisfy each target property of a set of target properties for processing a component, wherein the one or more candidate process recipes each correspond to a set of predicted properties, the set of predicted properties comprising, for each feature associated with processing the component, a respective predicted property value resulting from processing the component;
selecting, by the processing device from the one or more candidate process recipes, a process recipe comprising a set of Pareto efficient processing parameters for processing the component, and
causing, by the processing device, the component to be processed by a process tool in accordance with the set of Pareto efficient processing parameters of the process recipe.

A system comprising:

a memory and
a processing device coupled to the memory, the processing device to perform operations comprising:
obtaining one or more candidate process recipes each corresponding to a respective set of predicted processing parameters of one or more sets of predicted processing parameters that are determined to fail to satisfy each target property of a set of target properties for processing a component, wherein the one or more candidate process recipes each correspond to a set of predicted properties, the set of predicted properties comprising, for each feature, a respective predicted property value resulting from processing the component;
selecting, from the one or more candidate process recipes, a process recipe comprising a set of Pareto efficient processing parameters for processing the component;
and
causing the component to be processed by a process tool in accordance with the set of Pareto efficient processing parameters of the process recipe.

3 more elements

A non-transitory machine-readable storage medium storing instructions which, when executed by a processing device, cause the processing device to perform operations comprising:

obtaining one or more candidate process recipes each corresponding to a respective set of predicted processing parameters of one or more sets of predicted processing parameters that are determined to fail to satisfy each target property of a set of target properties for processing a component, wherein the one or more candidate process recipes each correspond to a set of predicted properties, the set of predicted properties comprising, for each feature, a respective predicted property value resulting from processing the component;
selecting, from the one or more candidate process recipes, a process recipe comprising a set of Pareto efficient processing parameters for processing the component;
and
causing the component to be processed by a process tool in accordance with the set of Pareto efficient processing parameters of the process recipe.

1 more element

Dependencies are inferred from the claim text.

Process recipe creation and matching using feature models

Life of this patent

Process recipe creation and matching using feature models

Life of this patent

Abstract

Claims14