Back to results
US 11,859,302 B2Granted
Electroplating apparatus and electroplating method
AssigneeUnimicron Technology Corp.
InventorsHeng-Ming Nien, Chih-Chiang Lu, Chih-Kai Chan, Shih-Lian Cheng
Life of this patent
Estimating the term…
Abstract
An electroplating apparatus includes an anode and a cathode, a power supply, a regulating plate, and a controller. The power supply is electrically connected to the anode and the cathode. The regulating plate is disposed between the anode and the cathode. The regulating plate includes an insulation grid plate and a plurality of wires. The controller is electrically connected to the plurality of wires to control a state of an electromagnetic field around the plurality of wires. An electroplating method is also provided.
Claims10
An electroplating method, comprising:
- providing an electroplating apparatus, wherein the electroplating apparatus comprises:
- an anode and a cathode;
- a power supply electrically connected to the anode and the cathode;
- a regulating plate disposed between the anode and the cathode, wherein the regulating plate comprises an insulation grid plate and a plurality of wires;
- and
- a controller electrically connected to the plurality of wires;
- fixing a substrate to be plated on the cathode, wherein the substrate to be plated comprises a dry film, the dry film has at least a first opening and a second opening, and the first opening is smaller than the second opening;
- after the power supply supplies a power, a plurality of electric lines of force moving from the anode to the cathode are formed;
- the controller controls a state of an electromagnetic field around the plurality of wires to change an incident angle of the plurality of electric lines of force passing through the regulating plate relative to the substrate to be plated, such that a number of the electric lines of force entering the first opening is less than a number of the electric lines of force entering the second opening;
- and
- forming a metal coating on the substrate to be plated.
8 more elements
Dependencies are inferred from the claim text.