Methods and apparatus for data analysis

A test data analysis system for analyzing test data generated by an automatic test equipment for a set of semiconductor components fabricated using a fabrication process and identifying a problem in the fabrication process, the system comprising:

• a processor configured to obtain the test data for the set of semiconductor components and to implement a diagnostic system;
• and
• a memory configured to store the test data;
• wherein the diagnostic system:
• filters the test data using a neural network configured to filter the test data, wherein the neural network comprises a self-organizing map;
• recognizes a pattern in the filtered test data corresponding to a recognized spatial pattern of the set of semiconductor components when the filtered test data is superimposed onto a wafermap;
• compares the recognized spatial pattern to a known spatial pattern associated with the problem;
• retrieves a stored neural network from the neural network library to analyze the filtered test data;
• classifies, using the stored neural network, the recognized spatial pattern according to the known spatial pattern, wherein the stored neural network comprises a self-organizing map and at least two stages, wherein:
• a first stage comprises a plurality of classifiers configured to receive different types of test data and generates first stage data based on the different types of test data;
• and
• a second stage configured to receive the first stage data from the plurality of classifiers and classify the known spatial pattern using the neural network based on the first stage data;
• identifies the problem in the fabrication process based on a classification of the recognized spatial pattern;
• and
• produces a report comprising the problem in the fabrication process.