Time delay valve and flow rate controller

A flow rate controller comprising:

• a first supply and discharge path configured to supply and discharge fluid to and from one port of a fluid pressure cylinder;
• a second supply and discharge path configured to supply and discharge fluid to and from another port of the fluid pressure cylinder;
• an operation switching valve configured to switch and connect a fluid supply source and a fluid discharge unit to the first supply and discharge path and the second supply and discharge path, the fluid supply source being configured to supply a control target fluid and the fluid discharge unit being configured to discharge fluid;
• and
• time delay valves provided in the first supply and discharge path and the second supply and discharge path, respectively,
• wherein each of the time delay valves comprises:
• a switching valve configured to be switched between a first position and a second position;
• a biasing member configured to bias the switching valve toward the first position;
• a drive mechanism configured to bias the switching valve toward the second position under an action of a supply pressure of a pilot fluid;
• a pilot flow path configured to guide the pilot fluid to the drive mechanism;
• and
• a delay mechanism configured to delay switching timing of the switching valve,
• wherein the delay mechanism comprises:
• a first throttle valve provided in the pilot flow path;
• and
• a compensation mechanism configured to bias the switching valve toward the first position prior to biasing by the drive mechanism under an action of the supply pressure of the pilot fluid,
• wherein the compensation mechanism is driven by a part of the pilot fluid flowing thereinto through a compensation flow path branched from the pilot flow path, and compensates a biasing force when the drive mechanism displaces the switching valve, in accordance with fluctuation in the supply pressure of the pilot fluid, and
• wherein the pilot flow path of the time delay valve of the first supply and discharge path is connected to the second supply and discharge path, and the pilot flow path of the time delay valve of the second supply and discharge path is connected to the first supply and discharge path.