Piezoelectric sensor assembly and manufacturing method thereof, display panel and electronic device

A manufacturing method of a piezoelectric sensor assembly, comprising:

• forming an acoustic matching layer on a base substrate;
• depositing a pore layer on a side of the acoustic matching layer away from the base substrate;
• forming a patterned mask layer on a side of the pore layer away from the base substrate to expose positions where isolation cavities will be formed;
• performing dry etching to allow etching gas to penetrate the pore layer at the positions where isolation cavities will be formed to form isolation cavities in the acoustic matching layer;
• removing the patterned mask layer;
• and
• forming a plurality of ultrasonic transducers on a side of the pore layer away from the base substrate.

A manufacturing method of a piezoelectric sensor assembly, comprising:

• forming a plurality of ultrasonic transducers on a base substrate;
• forming an acoustic matching layer on a side of the base substrate away from the plurality of ultrasonic transducers;
• depositing a pore layer on a side of the acoustic matching layer away from the base substrate;
• forming a patterned mask layer on a side of the pore layer away from the base substrate to expose positions where isolation cavities will be formed;
• performing dry etching to allow etching gas to penetrate the pore layer at the positions where isolation cavities will be formed to form isolation cavities in the acoustic matching layer;
• removing the patterned mask layer;
• and
• forming an insulating layer on a side of the pore layer away from the base substrate.