Acoustic wave resonator with mass loading strip for suppression of hyperbolic mode
AssigneeSkyworks Solutions, Inc.
InventorsYuya Hiramatsu, Rei Goto, Yumi Torazawa
Life of this patent
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Abstract
Aspects of this disclosure relate to an acoustic wave resonator with hyperbolic mode suppression. The acoustic wave resonator can include a piezoelectric layer, an interdigital transducer electrode, a temperature compensation layer, and a mass loading strip. The mass loading strip can be a conductive strip. The mass loading strip can overlap edge portions of fingers of the interdigital transducer electrode. A layer of the mass loading strip can have a density that is at least as high as a density of a material of the interdigital transducer electrode. The material of the interdigital transducer can impact acoustic properties of the acoustic wave resonator.
Claims24
A surface acoustic wave resonator comprising:
- an interdigital transducer electrode extending along a first length and including a bus bar and one or more fingers extending from the bus bar to an edge portion;
- and
- a mass loading strip overlapping the edge portion of the one or more fingers, the mass loading strip extending from a proximal end to a distal end along a second length shorter than the first length to thereby suppress a hyperbolic mode of the interdigital transducer electrode.
An acoustic wave filter comprising:
- a surface acoustic wave resonator configured to filter a radio frequency signal, the surface acoustic wave resonator including an interdigital transducer electrode extending along a first length and including a bus bar and one or more fingers extending from the bus bar to an edge portion, and a mass loading strip overlapping the edge portion of the one or more fingers, the mass loading strip extending from a proximal end to a distal end along a second length shorter than the first length to thereby suppress a hyperbolic mode of the interdigital transducer electrode.
A radio frequency module comprising:
- a package substrate;
- a surface acoustic wave component including one or more surface acoustic wave resonators configured to filter a radio frequency signal, each surface acoustic wave resonator including an interdigital transducer electrode extending along a first length and including a bus bar and one or more fingers extending from the bus bar to an edge portion, and a mass loading strip overlapping the edge portion of the one or more fingers and extending along a second length shorter than the first length to thereby suppress a hyperbolic mode of the interdigital transducer electrode;
- and
- additional circuitry, the surface acoustic wave component and additional circuitry disposed on the package substrate.
A wireless communication device comprising:
- an antenna;
- and
- a front end module including one or more surface acoustic wave resonators configured to filter a radio frequency signal associated with the antenna, each surface acoustic wave resonator including an interdigital transducer electrode extending along a first length and having a bus bar and one or more fingers extending from the bus bar to an edge portion, and a mass loading strip overlapping the edge portion of the one or more fingers and extending along a second length shorter than the first length to thereby suppress a hyperbolic mode of the interdigital transducer electrode.
Dependencies are inferred from the claim text.