Crystal manufacturing method, crystal manufacturing apparatus and single crystal
AssigneeTDK Corporation
InventorsKatsumi Kawasaki, Jun Arima, Minoru Fujita, Jun Hirabayashi
Life of this patent
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Abstract
In a crystal manufacturing method, first, a feedstock including a tapered tip portion is disposed above a crystal growth region. Then, a side surface of the tip portion is selectively heated and melted by radiant heat traveling diagonally upward while a shape of the tip portion is maintained, and the side surface of the tip portion is physically connected to an upper surface of the crystal growth region by a material melted from the side surface. In a crystal manufacturing apparatus, the radiant heat for melting the feedstock is radiated from an electric resistance heater.
Claims14
A crystal manufacturing method comprising:
- disposing a feedstock including a tapered tip portion above a crystal growth region;
- and
- selectively heating and melting a side surface of the tip portion by radiant heat traveling diagonally upward while a shape of the tip portion is maintained, and physically connecting the side surface of the tip portion to an upper surface of the crystal growth region by a material melted from the side surface.
A crystal manufacturing apparatus comprising:
- means for disposing a feedstock including a tapered tip portion above a crystal growth region;
- and
- means for selectively heating and melting a side surface of the tip portion by radiant heat traveling diagonally upward while a shape of the tip portion is maintained, and physically connecting the side surface of the tip portion and an upper surface of the crystal growth region by a material melted from the side surface.
A crystal manufacturing apparatus comprising:
- a support configured to support a feedstock with a tapered tip portion;
- an electric resistance heater (i) below the support in an up-down direction, (ii) configured to generate radiant heat that travels diagonally upward to melt the feedstock supported by the support and (iii) including a resistance portion that is inclined with respect to a horizontal plane and the up-down direction;
- and
- a heat shield below the electric resistance heater.
Dependencies are inferred from the claim text.